Deposition of ZnO thin films on (最新3篇)

时间:2016-04-03 03:17:30
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篇一:Deposition of ZnO thin films on Transparent Substrates

Introduction

Zinc oxide (ZnO) thin films have attracted significant attention in recent years due to their wide range of applications in optoelectronic devices, such as solar cells, light-emitting diodes (LEDs), and gas sensors. The properties of ZnO thin films greatly depend on the deposition technique and the substrate used. In this article, we will discuss the deposition of ZnO thin films on transparent substrates and the impact of deposition parameters on film properties.

Deposition Techniques

There are several deposition techniques commonly used for the fabrication of ZnO thin films, including physical vapor deposition (PVD) techniques such as thermal evaporation, sputtering, and pulsed laser deposition (PLD), as well as chemical vapor deposition (CVD) techniques such as metal-organic chemical vapor deposition (MOCVD) and atomic layer deposition (ALD). Each technique has its own advantages and disadvantages in terms of film quality, thickness uniformity, and deposition rate.

Impact of Deposition Parameters

The deposition parameters, such as substrate temperature, deposition time, gas pressure, and precursor concentration, play a crucial role in determining the properties of ZnO thin films. For example, the substrate temperature during deposition affects the crystallinity, grain size, and surface morphology of the films. Higher substrate temperatures generally result in improved crystallinity and larger grain sizes. However, excessive temperatures can lead to film degradation and substrate damage.

In addition, the gas pressure and precursor concentration also influence the film properties. Higher gas pressures and precursor concentrations can promote nucleation and growth, resulting in thicker films. However, these conditions can also lead to increased roughness and defects in the films. Therefore, it is crucial to optimize the deposition parameters to achieve the desired film properties.

Applications of ZnO Thin Films on Transparent Substrates

The deposition of ZnO thin films on transparent substrates opens up numerous applications in optoelectronic devices. For example, ZnO thin films can be used as transparent electrodes in solar cells and LEDs. The high optical transparency and low resistivity of ZnO make it an excellent candidate for replacing conventional indium tin oxide (ITO) electrodes, which are expensive and scarce.

Furthermore, ZnO thin films can be used as gas sensors due to their high sensitivity to various gases. By depositing ZnO thin films on transparent substrates, the gas sensors can be integrated into transparent windows or screens, enabling real-time monitoring of gas concentrations without obstructing the view.

Conclusion

The deposition of ZnO thin films on transparent substrates offers great potential for various optoelectronic applications. By carefully controlling the deposition parameters, it is possible to achieve high-quality films with desired properties. Further research and development in this area will undoubtedly lead to the advancement of ZnO thin film technology and the realization of novel devices with improved performance.

篇二:Deposition of ZnO Thin Films on Flexible Substrates

Introduction

Zinc oxide (ZnO) thin films have gained significant attention in recent years due to their unique properties and potential applications in flexible electronics. Unlike traditional rigid substrates, such as silicon wafers, flexible substrates offer advantages in terms of portability, lightweight, and conformal integration. In this article, we will explore the deposition of ZnO thin films on flexible substrates and discuss the challenges and opportunities associated with this process.

Deposition Techniques for Flexible Substrates

Depositing ZnO thin films on flexible substrates requires the use of techniques that are compatible with the mechanical properties of the substrates. Common deposition techniques for flexible substrates include roll-to-roll (R2R) processes, such as slot-die coating, gravure printing, and spray coating. These techniques enable the continuous deposition of films over large areas, making them suitable for industrial-scale production.

Challenges and Opportunities

Depositing ZnO thin films on flexible substrates poses several challenges. One of the major challenges is the control of film thickness and uniformity. Flexible substrates often have surface roughness and non-uniformities, which can affect the deposition process and film quality. Therefore, it is crucial to develop deposition techniques that can compensate for these substrate imperfections and ensure uniform film coverage.

Another challenge is the adhesion between the ZnO thin films and the flexible substrates. Flexible substrates are typically made of polymer materials, which have low surface energy and poor adhesion properties. Improving the adhesion strength is essential to prevent film delamination or cracking during bending or stretching.

Despite these challenges, the deposition of ZnO thin films on flexible substrates offers exciting opportunities for flexible electronics. ZnO thin films can be used as transparent electrodes in flexible displays, touch screens, and wearable devices. The flexibility and transparency of ZnO thin films make them ideal for applications where mechanical flexibility and optical transparency are required.

Conclusion

The deposition of ZnO thin films on flexible substrates is a promising area of research for the development of flexible electronics. By overcoming the challenges associated with film thickness control and adhesion, it is possible to achieve high-quality ZnO thin films on flexible substrates. Further advancements in deposition techniques and material engineering will pave the way for the realization of flexible electronic devices with enhanced performance and functionality.

Deposition of ZnO thin films on 篇三

Deposition of ZnO thin films on (100) γ-LiAlO2 substrate

Optical properties for ZnO thin films grown on (100) γ-LiAlO2 (LAO) substrate by pulsed laser deposition method were investigated. The c-axis oriented ZnO films were grown on (100) γ-LiAlO2 substrates at the substrate temperature of 550 C. The transmittance of the films was over 85%. Peaks attributed to excitons were shown in absorption spectra, which indicated that thin films had high crystallinity. Photoluminescence spectra with the maximum peak at 540 nm were observed at room temperature, which seemed to be ascribed to oxygen vacancy in the ZnO films caused by diffusion of Li from the substrates into the films during the deposition.

作 者: Jun Zou Shengming Zhou Xia Z

hang Fenglian Su Xiaomin Li Jun Xu 作者单位: Jun Zou(Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800;Graduate School of the Chinese Academy of Science, Beijing 100039)

Shengming Zhou,Jun Xu(Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800)

Xia Zhang,Xiaomin Li(Shanghai Institute of Ceramics, Chinese Academy of Science, Shanghai 200050)

Fenglian Su(Anhui University,Anhui,100086)

刊 名:中国光学快报(英文版) EI SCI 英文刊名: CHINESE OPTICS LETTERS 年,卷(期): 20053(8) 分类号: 关键词:
Deposition of ZnO thin films on (最新3篇)

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